Recommended prerequisite for participation in the module

The module builds on knowledge obtained from Solid State Physics I, Introduction to Mechanics and Thermodynamics, and General and Inorganic Chemstry.

Content, progress and pedagogy of the module

Learning objectives


• Must have knowledge of the main microfabrication processes, including lithography, etching, and deposition.
• Must have basic understanding of the main equipment types used in micro-/nano-fabrication


• Must be able to design and implement basic micro-/nano-fabrication pro-cesses


• Must demonstrate good knowledge of basic methods used for fabrication of devices on micro- and nanoscale.
• Must be able to perform basic micro-/nano-fabrication processes and work in the clean-room environment.

Type of instruction

Lectures, tutorials and practical exercises.

Extent and expected workload

This is a 5 ECTS course  module and the work load is expected to be 150 hours for the student.



Name of examNanofabrikation
Type of exam
Active participation/continuous evaluation
Internal running evaluation (pass/no pass) based on active participation in the course, including tutorials, lab exercises and assignments.
AssessmentPassed/Not Passed
Type of gradingInternal examination
Criteria of assessmentThe criteria of assessment are stated in the Examination Policies and Procedures

Facts about the module

Danish titleNanofabrikation
Module codeF-NAN-B5-2
Module typeCourse
Duration1 semester
Language of instructionEnglish
Empty-place SchemeYes
Location of the lectureCampus Aalborg
Responsible for the module


Education ownerBachelor of Science (BSc) in Engineering (Physics and Technology)
Study BoardStudy Board of Mechanical Engineering and Physics
DepartmentDepartment of Materials and Production
FacultyThe Faculty of Engineering and Science