Recommended prerequisite for participation in the module

Content, progress and pedagogy of the module

Learning objectives

Knowledge

• Must have the knowledge and understanding of the most im-portant nanotechnological fabrication methods such as optical and e-beam lithography, physical and chemical vapor deposition, wet and dry etching techniques
• Must have the knowledge and understanding of the most important imaging and analysis techniques, e.g. SEM, AFM, ellip-sometry etc.
• Should understand scientific methods and theories in relation to the topic of the semester

Skills

• Must be able to apply micro- and nano-fabrication methods to produce components for (bio)sensors, nanoelectronics, and nanooptics devices
• Must understand limitation and advantages of various fabrication techniques and must be able devise the fabrication process accordingly
• Must be able to evaluate the quality of the produced nanostructures

Competences

• Must demonstrate a good understanding of design, fabrication and analysis procedures required for production of functional nanoscale structures
• Must be able to apply the knowledge within nanofabrication in order to design, create, and analyse structures on the nanoscale
• Must be able to reflect over relevant theories and methods used for fabrication of nanostructures

Type of instruction

Project work with supervision.

Extent and expected workload

This is a 15 ECTS project module and the work load is expected to be 450 hours for the student.
 

Exam

Exams