Fabrication of Nanostructures - Project


Recommended prerequisite for participation in the module

The module builds on knowledge obtained from the project module on 4th semester.

Content, progress and pedagogy of the module

Learning objectives


• Must have the knowledge and understanding of the most im-portant nanotechnological fabrication methods such as optical and e-beam lithography, physical and chemical vapor deposition, wet and dry etching techniques
• Must have the knowledge and understanding of the most important imaging and analysis techniques, e.g. SEM, AFM, ellip-sometry etc.
• Should understand scientific methods and theories in relation to the topic of the semester


• Must be able to apply micro- and nano-fabrication methods to produce components for (bio)sensors, nanoelectronics, and nanooptics devices
• Must understand limitation and advantages of various fabrication techniques and must be able devise the fabrication process accordingly
• Must be able to evaluate the quality of the produced nanostructures


• Must demonstrate a good understanding of design, fabrication and analysis procedures required for production of functional nanoscale structures
• Must be able to apply the knowledge within nanofabrication in order to design, create, and analyse structures on the nanoscale
• Must be able to reflect over relevant theories and methods used for fabrication of nanostructures

Type of instruction

Project work with supervision.

Extent and expected workload

This is a 15 ECTS project module and the work load is expected to be 450 hours for the student.



Name of examFabrikation af nanostrukturer - projekt
Type of exam
Oral exam based on a project
Permitted aids
All written and all electronic aids
Assessment7-point grading scale
Type of gradingExternal examination
Criteria of assessmentThe criteria of assessment are stated in the Examination Policies and Procedures

Facts about the module

Danish titleFabrikation af nanostrukturer - projekt
Module codeF-NAN-B5-1
Module typeProject
Duration1 semester
Language of instructionDanish and English
Empty-place SchemeYes
Location of the lectureCampus Aalborg
Responsible for the module


Study BoardStudy Board of Mechanical Engineering and Physics
DepartmentDepartment of Materials and Production
FacultyThe Faculty of Engineering and Science