• Must have knowledge of the main microfabrication processes,
including lithography, etching, and deposition.
• Must have basic understanding of the main equipment types used in
micro-/nano-fabrication
• Must be able to design and implement basic micro-/nano-fabrication pro-cesses
• Must demonstrate good knowledge of basic methods used for
fabrication of devices on micro- and nanoscale.
• Must be able to perform basic micro-/nano-fabrication processes
and work in the clean-room environment.
Lectures, tutorials and practical exercises.
This is a 5 ECTS course module and the work load is
expected to be 150 hours for the student.
Name of exam | Nanofabrikation |
Type of exam | Active participation/continuous evaluation
Internal running evaluation (pass/no pass) based on active
participation in the course, including tutorials, lab exercises and
assignments. |
ECTS | 5 |
Assessment | Passed/Not Passed |
Type of grading | Internal examination |
Criteria of assessment | The criteria of assessment are stated in the Examination Policies and Procedures |
Danish title | Nanofabrikation |
Module code | F-NAN-B5-2 |
Module type | Course |
Duration | 1 semester |
Semester | Autumn
|
ECTS | 5 |
Language of instruction | English |
Empty-place Scheme | Yes |
Location of the lecture | Campus Aalborg |
Responsible for the module |
Study Board | Study Board of Mechanical Engineering and Physics |
Department | Department of Materials and Production |
Faculty | Faculty of Engineering and Science |