Prerequisite/Recommended prerequisite for participation in the module

The module builds on knowledge obtained from Solid State Physics I, Introduction to Mechanics and Thermodynamics, and General and Inorganic Chemstry.

Content, progress and pedagogy of the module

Learning objectives

Knowledge

• Must have knowledge of the main microfabrication processes, including lithography, etching, and deposition.
• Must have basic understanding of the main equipment types used in micro-/nano-fabrication

Skills

• Must be able to design and implement basic micro-/nano-fabrication pro-cesses

Competences

• Must demonstrate good knowledge of basic methods used for fabrication of devices on micro- and nanoscale.
• Must be able to perform basic micro-/nano-fabrication processes and work in the clean-room environment.

Type of instruction

Lectures, tutorials and practical exercises.

Extent and expected workload

This is a 5 ECTS course  module and the work load is expected to be 150 hours for the student.
 

Exam

Exams

Name of exam	Nanofabrikation
Type of exam	Active participation/continuous evaluation Internal running evaluation (pass/no pass) based on active participation in the course, including tutorials, lab exercises and assignments.
ECTS	5
Assessment	Passed/Not Passed
Type of grading	Internal examination
Criteria of assessment	As stated in the Joint Programme Regulations. http:/​/​www.engineering.aau.dk/​uddannelse/​Studieadministration/​