Nanofabrication

2018/2019

Prerequisite/Recommended prerequisite for participation in the module

The module builds on knowledge obtained from Solid State Physics I, Introduction to Mechanics and Thermodynamics, and General and Inorganic Chemstry.

Content, progress and pedagogy of the module

Learning objectives

Knowledge

• Must have knowledge of the main microfabrication processes, including lithography, etching, and deposition.
• Must have basic understanding of the main equipment types used in micro-/nano-fabrication

Skills

• Must be able to design and implement basic micro-/nano-fabrication pro-cesses

Competences

• Must demonstrate good knowledge of basic methods used for fabrication of devices on micro- and nanoscale.
• Must be able to perform basic micro-/nano-fabrication processes and work in the clean-room environment.

Type of instruction

Lectures, tutorials and practical exercises.

Extent and expected workload

This is a 5 ECTS course  module and the work load is expected to be 150 hours for the student.
 

Exam

Exams

Name of examNanofabrikation
Type of exam
Active participation/continuous evaluation
Internal running evaluation (pass/no pass) based on active participation in the course, including tutorials, lab exercises and assignments.
ECTS5
AssessmentPassed/Not Passed
Type of gradingInternal examination
Criteria of assessmentAs stated in the Joint Programme Regulations.
http:/​/​www.engineering.aau.dk/​uddannelse/​Studieadministration/​

Facts about the module

Danish titleNanofabrikation
Module codeF-NAN-B5-2
Module typeCourse
Duration1 semester
SemesterAutumn
ECTS5
Empty-place SchemeYes
Location of the lectureCampus Aalborg
Responsible for the module

Organisation

Study BoardStudy Board of Mathematics, Physics and Nanotechnology
FacultyFaculty of Engineering and Science